Transformer ignition circuit for a transformer coupled plasma source

ABSTRACT

An apparatus includes a vacuum chamber, an electrical transformer that surrounds the vacuum chamber to induce an electromagnetic field within the vacuum chamber, and an ignition circuit. The electrical transformer induces an electromagnetic field within the vacuum chamber. The transformer includes a primary winding and a plasma loop coupled to the vacuum chamber to perform as a secondary winding. The ignition circuit is coupled to an ignition core section of the vacuum chamber to ignite the vacuum chamber.

The present application is a continuation of application Ser. No.10/355,618, entitled “Transformer Ignition Circuit for a TransformerCoupled Plasma Source”, filed Jan. 31, 2003, now U.S. Pat. No. 6,822,396and claims priority thereof.

FIELD OF THE INVENTION

The present invention relates to the field of remote plasma sources;more particularly, the present invention relates to the ignition oftransformer coupled plasma (TCP) sources.

BACKGROUND

Transformer coupled plasmas are routinely used in a number of differentapplications including materials processing, production of activatedgases, pollutant abatement and many others. In such devices, themagnetic core of the excitation transformer is placed in close proximityto, around or within a vacuum chamber. When the primary winding of thistransformer is excited with radio frequency (RF), the electromagneticfields induced around the core sustain a gas plasma discharge within thevacuum apparatus.

One of the main advantages of TCPs is that the power capacitivelycoupled into the plasma is minimized, resulting in a decrease in chamberwall damage through ion bombardment and, consequently, in extendedlifetimes for the plasma chamber. However, this advantage poses aproblem for plasma ignition since the capacitive fields are needed tostart a plasma discharge.

One of the solutions to this problem has been the introduction of anauxiliary capacitive discharge used to generate enough free chargeswithin the plasma chamber so that an inductively coupled plasma can beestablished. This additional capacitive discharge is usually driven byan external high voltage circuit.

SUMMARY

According to one embodiment, an apparatus is described. The apparatusincludes a vacuum chamber, an electrical transformer coupled to thevacuum chamber, and an ignition circuit. The electrical transformerinduces an electromagnetic field within the vacuum chamber. Thetransformer includes a primary winding and a magnetic core. In addition,the transformer includes a secondary winding, to which the circuit usedto ignite the vacuum chamber is coupled. The ignition circuit is used toignite the vacuum chamber.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention will be understood more fully from the detaileddescription given below and from the accompanying drawings of variousembodiments of the invention, which, however, should not be taken tolimit the invention to the specific embodiments, but are for explanationand understanding only.

FIG. 1 illustrates one embodiment of a plasma source coupled to an RFpower generator;

FIG. 2 illustrates an example of a chamber configuration;

FIG. 3 illustrates one embodiment of a chamber configuration;

FIG. 4 illustrates an electrical representation of one embodiment of aplasma source, with an ignition circuit, coupled to a RF powergenerator;

FIG. 5 illustrates an electrical representation of another embodiment ofa plasma source, with an ignition circuit, coupled to a RF powergenerator;

FIG. 6 illustrates an electrical representation of yet anotherembodiment of a plasma source, with an ignition circuit, coupled to a RFpower generator;

FIG. 7 illustrates an electrical representation of still anotherembodiment of a plasma source, with an ignition circuit, coupled to a RFpower generator; and

FIG. 8 illustrates an electrical representation of still anotherembodiment of a plasma source, with an ignition circuit, coupled to a RFpower generator.

DETAILED DESCRIPTION

According to one embodiment, a transformer ignition circuit isdescribed. In the following description, numerous details are set forth.It will be apparent, however, to one skilled in the art, that thepresent invention may be practiced without these specific details. Inother instances, well-known structures and devices are shown in blockdiagram form, rather than in detail, in order to avoid obscuring thepresent invention.

Reference in the specification to “one embodiment” or “an embodiment”means that a particular feature, structure, or characteristic describedin connection with the embodiment is included in at least one embodimentof the invention. The appearances of the phrase “in one embodiment” invarious places in the specification are not necessarily all referring tothe same embodiment.

FIG. 1 illustrates one embodiment of a plasma chamber 150 coupled to anRF power generator 110. In one embodiment, the RF power is coupled tothe plasma discharge within the plasma chamber 150 via one or moretransformers that utilize at least one magnetic core. Only onetransformer 130 is shown here to avoid obscuring the present invention.

The excitation transformer 130 includes the primary winding, which iscoupled to the RF power supply 110, and a magnetic core, and thesecondary winding 170, which along with the resistance Rp represent theplasma discharge. Note that resistance Rp does not appear until plasmasource 130 has been ignited. The transformer 130 also includes asecondary winding 180.

According to one embodiment, an ignition circuit 140 is coupled toplasma chamber 150 and to excitation transformer 130. Ignition circuit140, driven by secondary winding 180 of one of the excitationtransformers of the plasma chamber, produces and controls the ignitionof the plasma within the plasma chamber 150.

FIG. 2 illustrates an exemplary plasma source chamber configuration. Thechamber includes a transformer with a primary winding, a magnetic core,and a dielectric break. The chamber also includes an ignition input thatreceives an ignition voltage Vi in order to ignite the chamber.

The plasma chamber is ignited by an ignition circuit (not shown) thatcouples power to the plasma source via a capacitive discharge. Thisdischarge generates free charges that are used to establish theinductive plasma discharge. Once established, the inductive dischargeperforms as a single turn secondary for the transformer.

FIG. 3 illustrates one embodiment of a plasma chamber 150. The chamberincludes four dielectric breaks, excitation transformers 130 and 135,and ignition inputs 370 and 375. Sections 300 and 310 of the plasmachamber are connected to ground. Sections 320 and 330, denominatedignition cores are electrically isolated from ground by the dielectricbreaks.

According to one embodiment, the ignition inputs 370 and 375 areconnected to ignition cores 320 and 330, respectively. According toanother embodiment, the ignition inputs 370 and 375 can be connected toelectrodes electrically isolated form the chamber. FIG. 3 also shows theplasma loop 340, which is established within the plasma chamber afterthe ignition circuit produces enough free charges to initiate theinductively coupled discharge.

Ignition inputs 370 and 375 are used to inject a voltage in order tostart chamber 150. The ignition inputs receive a high voltage from anignition circuit, described below. According to one embodiment,controlled ignition voltage and current are provided at both inputs 370and 375. The voltage in inputs 370 and 375 can either be applied withrespect to ground or be a differential voltage between the inputs.

In the first case, capacitive discharges are established between theignition cores and the grounded sections of the chamber, whereas in thesecond case the capacitive discharge is established between the ignitioncores. However, in other embodiments, the ignition voltage may besupplied to either of inputs 370 and 375 individually.

FIGS. 4 to 8 illustrate electrical representations of differentembodiments of a plasma source with an ignition circuit driven by asecondary winding of the excitation transformer. In all cases, theignition circuits include one or more switches S that are closed duringignition. As a result, an ignition voltage is applied to ignition input370 and/or 375 to ignite chamber 150. According to one embodiment, aswitch is opened once chamber 150 is ignited. Consequently, the ignitioncurrent and voltage applied to chamber 150 are discontinued after theinductively coupled plasma is established.

FIG. 4 illustrates an electrical representation of one embodiment of anignition circuit 140 coupled to excitation transformer 130. Note thatonly one transformer is shown in order to avoid obscuring the presentinvention. Ignition circuit 140 includes the primary and secondarywindings of transformer 450, a switch (S), and a capacitor (C).

According to one embodiment, whenever a voltage from RF power generator110 is applied to primary winding 160, the secondary winding 180generates a floating voltage at the primary of transformer 450. When theswitch S is closed, the secondary of transformer 450 provides theignition voltage V_(I) through the coupling capacitor C.

FIG. 5 illustrates an electrical representation of another embodiment ofan ignition circuit 140 coupled to excitation transformer 130. In thisembodiment, ignition circuit 140 includes a switch S that is coupleddirectly to secondary winding 180. In addition, a capacitor and inductorare coupled in series with the switch.

FIG. 6 illustrates an electrical representation of another embodiment ofan ignition circuit 140 coupled to excitation transformer 130. In thisembodiment, ignition circuit 140 includes a switch S coupled to thesecondary winding 180 and a ballast 620. Ballast 620 limits the maximumcurrent through ignition circuit 140 so that the winding 180 is notshorted during ignition.

FIG. 7 illustrates an electrical representation of another embodiment ofan ignition circuit 140 coupled to the secondary winding 180 ofexcitation transformer 130. In this embodiment, ignition circuit 140includes the switch S, the capacitor C, and an autotransformer 750coupled to the capacitor. During ignition, when the switch S is closed,the autotransformer 750 generates a voltage that ignites the plasmachamber 150.

FIG. 8 illustrates an electrical representation of yet anotherembodiment of an ignition circuit 140 coupled to excitation transformer130. In this embodiment, ignition circuit includes the switches S andthe transformer 850. The output of transformer 850 is connected toignition inputs 370 and 375. During ignition, when the switches S areclosed, the secondary winding of transformer 850 generates adifferential voltage between inputs 370 and 375 that ignites the plasmachamber 150.

Whereas many alterations and modifications of the present invention willno doubt become apparent to a person of ordinary skill in the art afterhaving read the foregoing description, it is to be understood that anyparticular embodiment shown and described by way of illustration is inno way intended to be considered limiting. Therefore, references todetails of various embodiments are not intended to limit the scope ofthe claims which in themselves recite only those features regarded asessential to the invention.

Thus, a mechanism to ignite a transformer coupled plasma chamber hasbeen described.

1. An apparatus comprising: a) a vacuum chamber; b) an electricaltransformer that surrounds the vacuum chamber to induce anelectromagnetic field within the plasma chamber, the transformercomprising a primary winding and a plasma loop within the chamber thatperforms as a secondary winding coupled to the vacuum chamber; and c) anignition circuit coupled to an ignition core section of the vacuumchamber for igniting the plasma within the vacuum chamber.
 2. Theapparatus of claim 1 wherein the ignition core section is electricallyisolated by dielectric breaks.
 3. The apparatus of claim 1 wherein thevacuum chamber comprises a plurality of ignition core sections.
 4. Theapparatus of claim 1 wherein the transformer further comprises anauxiliary secondary winding.
 5. The apparatus of claim 4 wherein theignition circuit is coupled to the auxiliary secondary winding.
 6. Theapparatus of claim 5 wherein the ignition circuit comprises a switchbetween the auxiliary secondary winding and the ignition core section.7. The apparatus of claim 6 wherein the ignition circuit provides anignition voltage to the ignition core section when the switch is closed.8. The apparatus of claim 6 wherein the ignition circuit furthercomprises a second electrical transformer coupled to the auxiliarysecondary winding.
 9. The apparatus of claim 6 wherein the ignitioncircuit further comprises an autotransformer.
 10. The apparatus of claim6 wherein the ignition circuit further comprises a coupling capacitor.